Nanofabrication by three-dimensional lithography

Abstract

Accompanied with the rapid improvement of technology, creating three-dimensional micro- and nanostructures has become much more important to satisfy various demands. However, conventional techniques are usually used for planar structures which are not suitable to generate true three-dimensional structures. Three-dimensional direct laser writing, as an advanced micro- and nanofabrication technique, provides the way to produce arbitrary micro- and nanostructures. Therefore, in this thesis, we employ 3D lithography to fabricate the three-dimensional structure. In addition, further research using the achieved structure to form colloidal crystal will be briefly introduced.