Uncertainties in Charge Measurements of ESD Risk Assessment
Viheriäkoski, Toni; Kohtamäki, Jari; Peltoniemi, Terttu; Tamminen, Pasi (2015-09-27)
Viheriäkoski, Toni
Kohtamäki, Jari
Peltoniemi, Terttu
Tamminen, Pasi
27.09.2015
6B.3
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Julkaisun pysyvä osoite on
https://urn.fi/URN:NBN:fi:tty-201603013596
https://urn.fi/URN:NBN:fi:tty-201603013596
Kuvaus
Peer reviewed
Tiivistelmä
Charge measurement techniques are often considered too complicate to the process control of electronics manufacturing. In his study, we show that expensive instrumentation is not necessarily needed for characterizing ESD source parameters in a risk assessment. Measurement can be made accurately when uncertainties are properly taken into account.
Kokoelmat
- TUNICRIS-julkaisut [23777]