Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage

Abstract

<p>The aim of this work was to develop a process flow for ultrathin piezoelectric sensor fabrication in ambient conditions. An ultrathin sensor with inkjet-printed bottom and top electrodes and a spin coated P(VDF-TrFE) as an active layer is presented. The fabricated sensors were characterized by measuring remanent polarization P<sub>r</sub> and piezoelectric charge coefficient, d<sub>33</sub>. The achieved values were 5.2 μC/cm<sup>2</sup> and 20.4 pC/N, respectively, which were attained with 100V poling voltage. Total thickness of the sensor was 2.9 μm. Thus, we demonstrated that thin film piezoelectric sensors with low operation voltage can be fabricated in ambient conditions.</p>