Fabricating ultrathin piezoelectric sensors in ambient conditions with low operation voltage
Kajas, Ninja; Tewari, Amit; Ukkonen, Leena; Surakka, Veikko; Mantysalo, Matti (2024-07-25)
Kajas, Ninja
Tewari, Amit
Ukkonen, Leena
Surakka, Veikko
Mantysalo, Matti
IEEE
25.07.2024
Julkaisun pysyvä osoite on
https://urn.fi/URN:NBN:fi:tuni-202409128691
https://urn.fi/URN:NBN:fi:tuni-202409128691
Kuvaus
Peer reviewed
Tiivistelmä
The aim of this work was to develop a process flow for ultrathin piezoelectric sensor fabrication in ambient conditions. An ultrathin sensor with inkjet-printed bottom and top electrodes and a spin coated P(VDF-TrFE) as an active layer is presented. The fabricated sensors were characterized by measuring remanent polarization Pr and piezoelectric charge coefficient, d33. The achieved values were 5.2 μC/cm2 and 20.4 pC/N, respectively, which were attained with 100V poling voltage. Total thickness of the sensor was 2.9 μm. Thus, we demonstrated that thin film piezoelectric sensors with low operation voltage can be fabricated in ambient conditions.
Kokoelmat
- TUNICRIS-julkaisut [18885]