In-situ SEM micropillar compression and nanoindentation testing of SU-8 polymer up to 1000 s−1 strain rate
Cherukuri, Rahul; Lambai, Aloshious; Sukki, Lassi; Väliaho, Jari; Kallio, Pasi; Sarlin, Essi; Ramachandramoorthy, Rajaprakash; Kanerva, Mikko; Mohanty, Gaurav (2024-03-01)
Cherukuri, Rahul
Lambai, Aloshious
Sukki, Lassi
Väliaho, Jari
Kallio, Pasi
Sarlin, Essi
Ramachandramoorthy, Rajaprakash
Kanerva, Mikko
Mohanty, Gaurav
01.03.2024
135824
Julkaisun pysyvä osoite on
https://urn.fi/URN:NBN:fi:tuni-202401221653
https://urn.fi/URN:NBN:fi:tuni-202401221653
Kuvaus
Peer reviewed
Tiivistelmä
In situ micropillar compression and nanoindentation were performed on photolithographically fabricated SU-8 polymer inside a scanning electron microscope (SEM), covering seven orders of strain rates from 10-3 to 103 s−1. The extracted mechanical properties – modulus, hardness, yield strength, strain rate sensitivity (SRS) exponent – were systematically compared from both microscale tests and showed excellent agreement. No change in deformation mechanism was observed at high strain rates. We report a novel experimental protocol for high strain rate nanoindentation, comprising of input profile smoothing, that minimizes resonance amplitude during unloading and allows reliable extraction of modulus and hardness using standard Oliver-Pharr analysis. To the best of our knowledge, this is the first report of mechanical properties of SU-8 beyond 1 s−1 strain rate using nanoindentation based tests.
Kokoelmat
- TUNICRIS-julkaisut [19020]