"O'Connor, R." - Selaus tekijän mukaan TUNICRIS-julkaisut
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Aluminium oxide formation via atomic layer deposition using a polymer brush mediated selective infiltration approach
(2020)
articleArea selective deposition (ASD) is an emerging method for the patterning of electronic devices as it can significantly reduce processing steps in the industry. A potential ASD methodology uses infiltration of metal precursors ...
