Trepo - Selaus asiasanan mukaan "B. AFM"

    • Wet etching of dilute nitride GaInNAs, GaInNAsSb, and GaNAsSb alloys lattice-matched to GaAs 

      Raappana,Marianna; Polojärvi,Ville; Aho,Arto; Mäkelä,Jaakko; Aho,Timo; Tukiainen,Antti; Laukkanen,Pekka; Guina,Mircea (15.05.2018)
      /dk/atira/pure/researchoutput/researchoutputtypes/contributiontojournal/article
      We have studied the etching of GaInNAs, GaInNAsSb, and GaNAsSb alloys by NH4OH, H2SO4, and H3PO4 based solutions. NH4OH based solutions resulted in smooth surface, while other solutions created rougher and granular surfaces. ...